Computational study on polymer filling process in...

Microelectronic Engineering 2011 Vol. 88; Iss. 8

Computational study on polymer filling process in nanoimprint lithography

Masaaki Yasuda, Kosei Araki, Akihiro Taga, Akira Horiba, Hiroaki Kawata, Yoshihiko Hirai
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Volume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2011.01.016
File:
PDF, 1.32 MB
english, 2011
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