Ultra-smooth LiNbO3 micro and nano structures for photonic...

Microelectronic Engineering 2011 Vol. 88; Iss. 8

Ultra-smooth LiNbO3 micro and nano structures for photonic applications

Gwenn Ulliac, Blandine Guichardaz, Jean-Yves Rauch, Samuel Queste, Sarah Benchabane, Nadège Courjal
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Volume:
88
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2011.02.024
File:
PDF, 552 KB
english, 2011
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