Fabrication of large scale arrays of metallic nanodots by means of high resolution e-beam lithography
Vitaliy A. Guzenko, Jörg Ziegler, Anastasia Savouchkina, Celestino Padeste, Christian DavidVolume:
88
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2011.02.042
File:
PDF, 464 KB
english, 2011