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Characterization of ion/electron beam induced deposition of electrical contacts at the sub-μm scale
D. Brunel, D. Troadec, D. Hourlier, D. Deresmes, M. Zdrojek, T. MélinVolume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2011.03.011
File:
PDF, 792 KB
english, 2011