[IEEE 1998 Symposium on VLSI Technology Digest of Technical...

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[IEEE 1998 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (9-11 June 1998)] 1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216) - Characterization and elimination of trench dislocations

Damiano, J., Subramanian, C.K., Gibson, M., Feng, Y.-S., Zeng, L., Sebek, J., Deeters, E., Feng, C., McNelly, T., Blackwell, M., Nguyen, H., Tian, H., Scott, J., Zaman, J., Honcik, C., Miscione, M., C
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Year:
1998
Language:
english
DOI:
10.1109/vlsit.1998.689261
File:
PDF, 715 KB
english, 1998
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