RF MEMS Passives on High-Resistivity Silicon Substrates

IEEE Microwave and Wireless Components Letters 2013 / 12 Vol. 23; Iss. 12

RF MEMS Passives on High-Resistivity Silicon Substrates

Shim, Yonghyun, Raskin, Jean-Pierre, Roda Neve, Cesar, Rais-Zadeh, Mina
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Volume:
23
Language:
english
Journal:
IEEE Microwave and Wireless Components Letters
DOI:
10.1109/lmwc.2013.2283857
Date:
December, 2013
File:
PDF, 757 KB
english, 2013
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