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[IEEE 2012 IEEE International Interconnect Technology Conference - IITC - San Jose, CA, USA (2012.06.4-2012.06.6)] 2012 IEEE International Interconnect Technology Conference - Microprobing the mechanical effects of varying dielectric porosity in advanced interconnect structures
Hsing, Alexander, Geisler, Holm, Ryan, Vivian, Cheng, Ming, Machani, Kashi, Breuer, Dirk, Lehr, Matthias U., Paul, Jens, Iacopi, Francesca, Dauskardt, ReinholdYear:
2012
Language:
english
DOI:
10.1109/iitc.2012.6251666
File:
PDF, 346 KB
english, 2012