A novel harmless trimming for micro-device with defects and...

Microelectronics Journal 2004 Vol. 35; Iss. 2

A novel harmless trimming for micro-device with defects and particles in arbitrary geometry by fine milling of focused ion beam

Yongqi Fu, Zhongwei Shen, Ngoi Kok Ann Bryan
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Volume:
35
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mejo.2003.10.006
File:
PDF, 404 KB
english, 2004
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