[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - Investigation of KOH anisotropic etching of Si >100< wafers for improving etched surface quality
Wang Wei,, Liu Xiaowei,, Wang Xilian,, Liu Yuqiang,, Fan Maojun,Year:
1998
Language:
english
DOI:
10.1109/icsict.1998.785819
File:
PDF, 297 KB
english, 1998