Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM
Shiang-Woei Chyuan, Yunn-Shiuan Liao, Jeng-Tzong ChenVolume:
35
Year:
2004
Language:
english
Pages:
10
DOI:
10.1016/j.mejo.2004.06.005
File:
PDF, 768 KB
english, 2004