Micromechanical IBARs: Modeling and Process Compensation

Journal of Microelectromechanical Systems 2010 / 06 Vol. 19; Iss. 3

Micromechanical IBARs: Modeling and Process Compensation

Ho, Gavin K, Perng, John Kangchun, Ayazi, Farrokh
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2009.2030076
Date:
June, 2010
File:
PDF, 1.56 MB
english, 2010
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