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The influence of nitrogen and fluorine on the dielectric constant of hydrogenated amorphous carbon (a-C:H) films
M. Guerino, M. Massi, R.D. MansanoVolume:
38
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mejo.2007.04.003
File:
PDF, 134 KB
english, 2007