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Investigation of Zr–N thin films for use as diffusion barrier in Cu metallization
Ying Wang, Fei Cao, Minghui Ding, Dawei YangVolume:
38
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mejo.2007.06.001
File:
PDF, 363 KB
english, 2007