![](/img/cover-not-exists.png)
Characteristics of SiCN microstructures for harsh environment and high-power MEMS applications
Gwiy-Sang ChungVolume:
38
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.mejo.2007.07.078
File:
PDF, 801 KB
english, 2007