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Surface micromachined RF MEMS variable capacitor
Dong-Ming Fang, Shi Fu, Ying Cao, Yong Zhou, Xiao-Lin ZhaoVolume:
38
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mejo.2007.07.079
File:
PDF, 895 KB
english, 2007