Fabrication and characterization of a microelectromechanical tunable capacitor
Ching-Liang Dai, Shih-Chieh Lin, Ming-Wei ChangVolume:
38
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.mejo.2007.09.026
File:
PDF, 962 KB
english, 2007