Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs
Rana I. Shakoor, Shafaat A. Bazaz, M. Burnie, Y. Lai, M.M. HasanVolume:
42
Year:
2011
Language:
english
Pages:
9
DOI:
10.1016/j.mejo.2010.05.004
File:
PDF, 1.78 MB
english, 2011