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Integrated CNTs thin film for MEMS mechanical sensors
Van Thanh Dau, Takeo Yamada, Dzung Viet Dao, Bui Thanh Tung, Kenji Hata, Susumu SugiyamaVolume:
41
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.mejo.2010.07.012
File:
PDF, 619 KB
english, 2010