Evaluation of self-organized diffusion barrier continuity on a nano-architectural silica thin film with two-dimensionally connected cage-like pores using positronium time of flight spectroscopy
H.K.M. Tanaka, T. Kurihara, N. Nishiyama, T. Maruo, A.P. Mills Jr.Volume:
95
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.micromeso.2006.05.011
File:
PDF, 495 KB
english, 2006