[IEEE IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - Oulu, Finland (Aug. 1-4, 2005)] IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - 1x2 MEMS optical switch with sub 10 μs switching speed inside silicon gold coated planar hollow waveguides (PHW)

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