[IEEE 2012 25th International Vacuum Nanoelectronics Conference (IVNC) - Jeju, Korea (South) (2012.07.9-2012.07.13)] 25th International Vacuum Nanoelectronics Conference - Thermal-based MEMS vacuum gauges for measuring pressures from 10−2 Torr to 10−6 Torr
Zaker, E., Farid, S., Selvaraj, S. K., Bhavanarayana, C., Sorto, D., Kaur, R., Svean, B., Slusser, S., Habibimehr, P., Cheng, J-Y, Sliwa, K., Habeebuddin, F., Kirkpatrick, M., Dankovic, T., PunchihewaYear:
2012
Language:
english
DOI:
10.1109/ivnc.2012.6316933
File:
PDF, 77 KB
english, 2012