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[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Parallel-beams/lever electrothermal out-of-plane actuator
Deladi, S., Krijnen, G., Elwenspoek, M.C.Year:
2003
Language:
english
DOI:
10.1109/dtip.2003.1287017
File:
PDF, 437 KB
english, 2003