[IEEE Symposium on Design, Test, Integration and Packaging...

  • Main
  • [IEEE Symposium on Design, Test,...

[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Parallel-beams/lever electrothermal out-of-plane actuator

Deladi, S., Krijnen, G., Elwenspoek, M.C.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2003
Language:
english
DOI:
10.1109/dtip.2003.1287017
File:
PDF, 437 KB
english, 2003
Conversion to is in progress
Conversion to is failed