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[IEEE 2008 IEEE International Frequency Control Symposium - Honolulu, HI (2008.05.19-2008.05.21)] 2008 IEEE International Frequency Control Symposium - Stress control in AlN and Mo films for electro-acoustic devices
Felmetsger, Valery V., Laptev, Pavel. N.Year:
2008
Language:
english
DOI:
10.1109/freq.2008.4623076
File:
PDF, 1020 KB
english, 2008