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[IEEE 2009 International Semiconductor Device Research Symposium (ISDRS 2009) - College Park, MD (2009.12.9-2009.12.11)] 2009 International Semiconductor Device Research Symposium - Implementation of e-beam proximity effect correction using linear programming techniques for the fabrication of asymmetric bow-tie antennas
Yesilkoy, F., Peckerar, M.Year:
2009
Language:
english
DOI:
10.1109/isdrs.2009.5378016
File:
PDF, 877 KB
english, 2009