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[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - High-precision silicon differential pressure sensor monolithically integrated with twin diaphragms and micro over-range protection structures
Kato, S., Watanabe, T., Kato, C., Suzuki, Y., Kamimura, K., Suzuki, H., Suzuki, K., Hamanaka, H., Ikeda, K.Year:
2000
Language:
english
DOI:
10.1109/memsys.2000.838541
File:
PDF, 336 KB
english, 2000