A Micromachined Inline-Type Wideband Microwave Power Sensor Based on GaAs MMIC Technology
Lei Han,, Qing-An Huang,, Xiao-Ping Liao,, Shi Su,Volume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2009.2017113
Date:
June, 2009
File:
PDF, 754 KB
english, 2009