Decisive factors for realizing atomic-column resolution...

Micron 2008 Vol. 39; Iss. 3

Decisive factors for realizing atomic-column resolution using STEM and EELS

Koji Kimoto, Kazuo Ishizuka, Yoshio Matsui
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Volume:
39
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.micron.2007.09.009
File:
PDF, 573 KB
english, 2008
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