Microstructural investigation of nickel silicide thin films and the silicide–silicon interface using transmission electron microscopy
M. Bhaskaran, S. Sriram, D.R.G. Mitchell, K.T. Short, A.S. Holland, A. MitchellVolume:
40
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.micron.2008.01.012
File:
PDF, 693 KB
english, 2009