[IEEE IEEE International Solid-State Sensors and Actuators...

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Square-extensional mode single-crystal silicon micromechanical RF-resonator

Kaajakari, V., Mattila, T., Oja, A., Kiihamaki, J., Kattelus, H., Koskenvuori, M., Rantakari, P., Tittonen, I., Seppa, H.

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Volume:

Year:

2003

Language:

english

DOI:

10.1109/sensor.2003.1216924

File:

PDF, 293 KB

english, 2003

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