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Prediction of dielectric reliability from I–V characteristics: Poole–Frenkel conduction mechanism leading to √E model for silicon nitride MIM capacitor
K.-H. AllersVolume:
44
Year:
2004
Language:
english
Pages:
13
DOI:
10.1016/j.microrel.2003.12.007
File:
PDF, 424 KB
english, 2004