Silicon micro XY-stage with a large area shuttle and...

Journal of Microelectromechanical Systems 2003 / 08 Vol. 12; Iss. 4

Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage

Che-Heung Kim,, Hee-Moon Jeong,, Jong-Up Jeon,, Yong-Kweon Kim,
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Volume:
12
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2003.809960
Date:
August, 2003
File:
PDF, 1.76 MB
english, 2003
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