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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - A clean wafer-scale chip-release process without dicing based on vapor phase etching
Overstolz, T., Clerc, P.A., Noell, W., Zickar, M., de Rooij, N.F.Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290685
File:
PDF, 350 KB
english, 2004