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Biaxial initial stress characterization of bilayer gold RF-switches
K. Yacine, F. Flourens, D. Bourrier, L. Salvagnac, P. Calmont, X. Lafontan, Q.-H. Duong, L. Bucaillot, D. Peyrou, P. Pons, R. PlanaVolume:
45
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2005.07.093
File:
PDF, 1.11 MB
english, 2005