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Advanced backside failure analysis in 65 nm CMOS technology
Stephane Bianic, Stéphanie Allemand, Grégory Kerrosa, Pascal Scafidi, Didier RenardVolume:
47
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2007.07.076
File:
PDF, 1019 KB
english, 2007