Advanced backside failure analysis in 65 nm CMOS...

Advanced backside failure analysis in 65 nm CMOS technology

Stephane Bianic, Stéphanie Allemand, Grégory Kerrosa, Pascal Scafidi, Didier Renard
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Volume:
47
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2007.07.076
File:
PDF, 1019 KB
english, 2007
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