[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Novel backend singulation techniques to enable commercialization of optical MEMS
Aberson, J., Cusin, P., Wylde, J., Hickey, R., Fettig, H.Year:
2003
Language:
english
DOI:
10.1109/icmens.2003.1221980
File:
PDF, 165 KB
english, 2003