Ion projection direct structuring for patterning of...

IEEE Transactions on Magnetics 2002 / 09 Vol. 38; Iss. 5

Ion projection direct structuring for patterning of magnetic media

Dietzel, A., Berger, R., Grimm, H., Bruenger, W.H., Dzionk, C., Letzkus, F., Springer, R., Loeschner, H., Platzgummer, E., Stengl, G., Bandic, Z.Z., Terris, B.D.
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Volume:
38
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/tmag.2002.802846
Date:
September, 2002
File:
PDF, 196 KB
english, 2002
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