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A new on-chip test structure for real time fatigue analysis in polysilicon MEMS
G. Langfelder, A. Longoni, F. Zaraga, A. Corigliano, A. Ghisi, A. MerassiVolume:
49
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.microrel.2008.11.009
File:
PDF, 1.50 MB
english, 2009