Effects of periphery encapsulation material on the...

Microelectronics Reliability 2009 Vol. 49; Iss. 5

Effects of periphery encapsulation material on the characteristics of micro vacuum dielectric capacitor

Oi Ying Wong, Wing Shan Tam, Oi Kan Shea, Shiu Hung Cheung, Jun Liu, C.W. Kok, H. Wong
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Volume:
49
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2009.02.022
File:
PDF, 380 KB
english, 2009
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