Multiscale simulation of aluminum thin films for the design of highly-reliable MEMS devices
Haruka Kubo, Mauro Ciappa, Takayuki Masunaga, Wolfgang FichtnerVolume:
49
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2009.07.034
File:
PDF, 808 KB
english, 2009