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Characteristics optimization of N2O annealing on tungsten nanocrystal with W/Si dual-sputtered method for nonvolatile memory application
Jer-Chyi Wang, Pai-Chi Chou, Chao-Sung Lai, Wen-Hui Lee, Chi-Fong AiVolume:
50
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2010.01.027
File:
PDF, 901 KB
english, 2010