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Study of thinned Si wafer warpage in 3D stacked wafers
Youngrae Kim, Sung-Keun Kang, Sarah Eunkyung KimVolume:
50
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2010.05.006
File:
PDF, 840 KB
english, 2010