Modeling secondary electron images for linewidth measurement by critical dimension scanning electron microscopy
Mauro Ciappa, Alexander Koschik, Maurizio Dapor, Wolfgang FichtnerVolume:
50
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2010.07.120
File:
PDF, 1.04 MB
english, 2010