Modeling secondary electron images for linewidth...

Modeling secondary electron images for linewidth measurement by critical dimension scanning electron microscopy

Mauro Ciappa, Alexander Koschik, Maurizio Dapor, Wolfgang Fichtner
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Volume:
50
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2010.07.120
File:
PDF, 1.04 MB
english, 2010
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