RF-MEMS BAW Filter Using Surface Micromachining

Integrated Ferroelectrics 2002 / 01 Vol. 50; Iss. 1

RF-MEMS BAW Filter Using Surface Micromachining

Cong, Peng, Ren, Tian-Ling, Liu, Jian-She, Liu, Li-Tian
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Volume:
50
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580215524
Date:
January, 2002
File:
PDF, 625 KB
english, 2002
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