[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Flexible micro thermoelectric generator based on electroplated Bi2+xTe3−x

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