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[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Investigation of the formation of undercut during the fabrication of silicon microchannels by electrochemical etching
Jilei Lin,, Xiaoming Chen,, Shaohui Xu,, Peisheng Xin,, Lianwei Wang,Year:
2008
Language:
english
DOI:
10.1109/NEMS.2008.4484289
File:
PDF, 784 KB
english, 2008