Silicon fabricated submicrometer stepper motor for...

Journal of Microelectromechanical Systems 2002 / 4 Vol. 11; Iss. 2

Silicon fabricated submicrometer stepper motor for microsurgical procedures

Peichel, D., Marcus, D., Rizq, R.N., Erdman, A.G., Robbins, W.P., Polla, D.L.
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Volume:
11
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.993450
Date:
April, 2002
File:
PDF, 471 KB
english, 2002
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