[Japan Soc. Promotion of Sci International Vacuum Microelectronics Conference - Osaka, Japan (7-11 July 2003)] IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) - Field emission from a polymeric precursor to diamond-like carbon (DLC)
Busta, H., Partee, C., Joray, S., Lang, T., Edwards, E., Feinerman, A.Year:
2003
Language:
english
DOI:
10.1109/ivmc.2003.1223040
File:
PDF, 114 KB
english, 2003