[IEEE 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings - San Francisco, CA, USA (6-8 Oct. 1997)] 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) - Spare parts inventory management for semiconductor wafer fabrication facilities
Akcali, E., Hamlin, R.D., Teyner, T., Uzsoy, R., Venkatachalam, G.Year:
1997
Language:
english
DOI:
10.1109/issm.1997.664484
File:
PDF, 500 KB
english, 1997