[IEEE 2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Belgium (2014.04.7-2014.04.9)] 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - 2D micro-chamber for DC plasma working at low power
Rochus, Veronique, Samara, Vladimir, Vereecke, Bart, Soussan, Philippe, Onsia, Bart, Rottenberg, XavierYear:
2014
Language:
english
DOI:
10.1109/EuroSimE.2014.6813810
File:
PDF, 1.39 MB
english, 2014