[IEEE 2006 IEEE International Symposium on MicroNanoMechanical and Human Science - Nagoya University, Nagoya, Japan (2006.11.5-2006.11.8)] 2006 IEEE International Symposium on MicroNanoMechanical and Human Science - Development of 3-Dimentional Micro Probe using X-Ray Lithography and High-Strength Electroformed Ni

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