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[IEEE 2006 IEEE International Symposium on MicroNanoMechanical and Human Science - Nagoya University, Nagoya, Japan (2006.11.5-2006.11.8)] 2006 IEEE International Symposium on MicroNanoMechanical and Human Science - Development of 3-Dimentional Micro Probe using X-Ray Lithography and High-Strength Electroformed Ni
Kimura, Teppei, Ishida, Tomohiro, Fukinbara, Hajime, Arita, Naoki, Hattori, TadashiYear:
2006
Language:
english
DOI:
10.1109/mhs.2006.320249
File:
PDF, 6.13 MB
english, 2006